Invisix

Who owns Invisix?

Invisix is currently owned by Hitachi Ventures through Hitachi Ventures Fund IV (2025 vintage), since 2026.

Hand-verified · updated 2026-07-16

About Invisix

Invisix is an Eindhoven-based deep-tech company that develops soft X-ray metrology systems for advanced semiconductor manufacturing, allowing chipmakers to measure the three-dimensional structure of devices that conventional optical tools can no longer resolve. Its approach uses High Harmonic Generation, in which an ultra-short laser pulse fired into a gas releases short-wavelength, broadband soft X-rays that penetrate a chip's buried layers, with proprietary software then reconstructing a precise 3D picture of the structure at high throughput. The company positions itself in the metrology and inspection segment that underpins high-volume production of leading-edge logic and memory, the silicon behind the current wave of AI computing. A spin-out from Dutch lithography leader ASML, Invisix has licensed more than a decade of soft X-ray development from that parent, an unusual degree of technical de-risking for a seed-stage hardware business. As of 2026 it remains early in its commercial life, building out a new Eindhoven cleanroom and a 300mm-wafer testbench ahead of its first shippable system.

Ownership journey

Invisix was founded in Eindhoven in 2025 by Christina Porter, its chief executive, and Sietse van der Post, its chief technology officer, both PhD physicists and former ASML researchers who built the underlying soft X-ray technology inside the equipment maker before spinning it out. In May 2026 the company closed a EUR 20 million seed round led by Hitachi Ventures, investing through its Fund IV, alongside a syndicate of strategic and venture investors. Hitachi Ventures backs Invisix as a minority venture investor rather than a controlling owner, and remains an active shareholder in 2026. No exit or secondary transaction has been recorded, and the company is still an independent, venture-backed business.

Under PE ownership

The 2026 seed capital was earmarked for scaling the team, accelerating the first shippable soft X-ray metrology system and funding customer demonstrations at a new cleanroom in Eindhoven. Since the investment, Invisix has moved from a decade of incubated research toward commercialisation, standing up dedicated cleanroom facilities and advancing a 300mm-wafer-capable testbench aimed at high-volume chip production. Management has framed the licensed ASML technology base as giving customers a faster path to deployment than is typical for a hardware startup at this stage. As a company founded only in 2025 and financed in 2026, its operating track record remains short, with the funding directed at building the organisation and proving the system with tier-one semiconductor manufacturers rather than at established revenue growth.